| The piping diagram of OWUCS
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| The piping diagram of OWUCS
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| Specification
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| I. H-160 Ozone Generator (H-160) |
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Structure |
Silent discharge upon the surfaces of two quartz tubes |
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Dimensions (cm) |
85 x 60 x 190 |
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Weight (kg) |
440 |
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Feed gas |
O2: purity > 99.9¢H, 6 to 14 l/min, >2 bar-gauge CO2/N2: 1-2¢H of oxygen flow rate, > 200 ml/min, >2 bar-gauge Piping size: 1/4" Swagelok (SUS316) or 1/4" PFA tube |
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Ozone production |
160 g/h |
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Ozone concentration |
14¢H wt |
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Cooling method |
Water-cooled |
| Cooling water | 15¢J, > 10 l/min, 1.5 bar-gauge ( < 4.5 bar-gauge) |
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Ozone outlet |
Piping size: 1/4" Swagelok (SUS316) or 1/4" PFA tube Tube material: 316L stainless or Teflon 1/2¡¨ Swagelok (SUS316) |
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Interface |
PLC interface |
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Power supply |
1~, 230 V, 50/60 Hz |
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Power consumption |
3.8 kW (cooling system not included) |
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Exhaust |
> 350 pa |
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II. Ozonated Water Ultra Clean System of H Model (OWUCS-H)
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Dimensions (cm) |
95 x 60 x 190 |
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Weight (kg) |
330 |
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Input |
UPW flow rate: 0-40 l/min Minimum pressure should be 1 bar-gauge Ozone: generated by H-160 ozone generator Piping size: 3/4¡¨ PFA tube Pressure valve is necessary |
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Output |
UPW flow rate: 0-40 l/min Dissolved ozone concentration: 100-30 ppm Output pressure of ozonated water: 1.0-1.8 bar-gauge Piping size: 3/4¡¨ PFA tube (max. 20 l/min) or 1¡¨ PFA tube (max. 40 l/min) |
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CDA |
4-6 bar-gauge (min. 3.5 bar-gauge, max. 9 bar-gauge) |
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Exhaust |
> 100 pa Minimum setting should be 10 pa and 9 m/s |
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Drain system |
3/8¡¨ PFA tube |
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Consumption |
2.5 kW |
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Power supply |
1~, 230 V, 50/60 Hz |
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The inner structure of OWUCS-H
